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              Z512, Z522 Digital / Analog

              Mass Flow Controller / Meter

              SEC-Z512MGX SEC-Z522MGXN SEC-Z522MGX

              SEC-Z512X SEC-Z522XN SEC-Z522X

              SEF-Z512MGX SEF-Z522MGXN SEF-Z522MGX

              SEF-Z512X SEF-Z522XN SEF-Z522X

              Full-scale flow rate MR/MG number

              (N2 conversion flow rate) #R01:10SCCM













              Valve Type

              Flow rate at fully closed control valve

              Flow rate control range

              Flow rate measuring range (SEF)

              Operating temperature




              50 to 300 kPa (d)

              #5.5, #06: 100 to 300 kPa (d)

              Operating differential pressure (SEF)

              MAX. Operating pressure

              Pressure resistance

              Leak Integrity

              Flow rate setting signal

              Flow rate output signal

              Wetted materials

              1/4 inch VCR equivalent

              Option: 1.125 inch IGS

              Mounting orientation

              *1 The gas type and full scale settings for the SEC(SEF)-Z512MGX, Z522MGX, and Z522MGXN can be changed

              by the operator, using special software.

              *2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that

              associated with the full-scale MR and MG number values.

              *3 IGS: Integrated Gas System

              * SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).

              Mass flow controller model *1 SEC-Z512KX

              Mass flow meter model *1 SEF-Z512KX

              O: Normally open C: Normally closed

              ≤ 2% F.S.

              2-100% of F.S.


              MR/MG number

              #6.5: 22SLM

              #07: 30SLM

              #08: 50SLM

              0-100% of F.S.

              Accuracy *2 ±1.0%F.S. ±1.0%S.P.(Flow rate>25%F.S.)

              ±0.25%F.S.(Flow rate≤25%F.S.)

              5 to 50°C (recommended temperature range: 15 to 45°C)

              ≤ 1 second: Over full flow rate range

              ≤ ±0.5% F.S.

              ≤ ±0.2% F.S.

              Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)

              ≤ 300 kPa (d)

              450 kPa (g)

              1000 kPa (g)

              ≤ 5 x 10-12 Pa·m3/s (He)

              0.1 to 5 V DC (2% to F.S.); Input impedance 1 Mù or higher

              0 to 5 V DC (0% to F.S.); Minimum load resistance 2 kù or higher

              Digital interface

              With address function: RS-485 (transmission speed 38,400 bps)

              F-Net Protocol

              316L Stainless Steel (polished surface)

              Power supply

              +15V±5% 150mA

              -15V±5% 150mA

              Signal response

              Analog: D-Sub 9-pin (TOP)

              Digital: 2 LAN jacks (TOP)

              Standard Fitting *3

              1/4 inch VCR equivalent

              Option: 1.125 inch IGS, 1.5 inch IGS

              1.5 inch IGS


              Z512/522 Web Ver.001

              Subject to change without notice.

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